JPH0241359U - - Google Patents
Info
- Publication number
- JPH0241359U JPH0241359U JP11879688U JP11879688U JPH0241359U JP H0241359 U JPH0241359 U JP H0241359U JP 11879688 U JP11879688 U JP 11879688U JP 11879688 U JP11879688 U JP 11879688U JP H0241359 U JPH0241359 U JP H0241359U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- beam device
- slit
- support mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11879688U JPH0241359U (en]) | 1988-09-09 | 1988-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11879688U JPH0241359U (en]) | 1988-09-09 | 1988-09-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241359U true JPH0241359U (en]) | 1990-03-22 |
Family
ID=31363457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11879688U Pending JPH0241359U (en]) | 1988-09-09 | 1988-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241359U (en]) |
-
1988
- 1988-09-09 JP JP11879688U patent/JPH0241359U/ja active Pending
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